Direct-coupled Motor Driven Butterfly Valve MBV-ADⅡ-M4-ARJ Series
Full-closed and Conductance control valves using high-performance, versatile Servo Motor.
Direct-coupled Motor Driven Butterfly Valve“MBV-AD-M Series” is a full-closed and Conductance control valves using high-performance, versatile Servo Motor.
This valve can be operated with versatile running patterns such as the positioning, opening / closing speed, etc. at the fully closed,fully open, and other optional position of valve disc.
Characteristic
① Full closing (shut-off valve) and conductance adjustment can be done by one unit.
② This valve can easily be opened under a differential pressure condition of vacuum-atmospheric pressure.
③ The stop position accuracy can be reproduced easily by adopting “Direct-coupled Motor Driven mechanism” and “Highly precise Gear head”.
④ Highly durable against an impact of large flow evacuation.
⑤ This valve is optimum for FPD related equipment (Coater System, Bonding equipment )
⑥ The valve disc position can be confirmed from the outside by its angle indicator.
⑦ By adding optional components for control, automatic pressure control valve can be used as.
Note 1) The maximum value of the setting speed is decided according to the valve sizes.
Please have contact with our office.
Basic specification
| Type | ＭＢＶ－ＡＤⅡ－Ｍ４ （Mitsubishi／MR－J4series） ＭＢＶ－ＡＤⅡ－Ｍ４Ｂr ( Motor specifications／With brakes ) |
|---|---|
| Bore | ５ ０ Ａ 、 ６５Ａ 、 ８０ Ａ 、 １ ００Ａ 、 １５ ０Ａ 、 ２００ Ａ 、 ２ ５０Ａ |
| Leak Rate | １×１０-9Ｐａｍ3／ ｓ ｍａｘ |
| Pressure Range | １０5～１０-6 Ｐａ |
| Valve Disc Seal ＊１ | ＥＰＤＭ Ｏ-ｒｉｎｇ |
| Valve Rod Seal ＊２ | ＥＰＤＭ Ｏ-ｒｉｎｇ |
|---|---|
| Gas contact material | Ｓ Ｕ Ｓ ３０４ |
| Servo amplifier included | Compatible with positioning mode |
| Indicator | ＡＮＧＬＥ ＩＮＤＩＣＡＴＯＲ |
| Option | ＰＨＯＴＯ ＭＩＣＲＯ ＳＥＮＳＯＲ |
- * １, *２ EPDM is standard, but other material can be selected to a use.
* To maintain the performance of the valve, the valve O-ring must be replaced periodically and the valve seal must be lubricated periodically
※ To improve this specification may change without notice.
System configuration
※Included in the valve unit：Valve body、Servo-motor、Servo-amplifier
（Please refer to the “optional selection list” other than those above.）
Equipped sevo-amplifier dimensions
About the motor correspondence of those other than a standard
We will consult also about change on motors according to the equipment usage environment of your company, such as servo motors other than a standard motor.
Dimensions of MBV-JIS ADⅡ-M4
| Unit in:mm | |||||
| Model | MBV-3AD Ⅱ -M4-ARJ | MBV-4AD Ⅱ -M4-ARJ | MBV-6AD Ⅱ -M4-ARJ | MBV-8AD Ⅱ -M4-ARJ | MBV-10AD Ⅱ -M4-ARJ |
| MOD No. | 10809 □ | 10810 □ | 10811 □ | 10812 □ | 10813 □ |
| A | 20 | 20 | 26 | 40 | 40 |
| B | 81 | 104 | 158 | 209 | 258 |
| C | 120 | 145 | 190 | 250 | 302 |
| D | 160 | 185 | 235 | 300 | 350 |
| n —E | 4- φ 12 | 8- φ 12 | 8- φ 12 | 8- φ 15 | 12- φ 15 |
| F | 135 | 160 | 210 | 270 | 320 |
| G | 80 | 102 | 154 | 206 | 254 |
| H | 413.5 | 439 | 503 | 639 | 689 |
| J | 101.5 | 114 | 140.5 | 176.5 | 201.5 |
| K | 78 | 91 | 116.5 | 148.5 | 173.5 |
| L | 93 | 93 | 98 | 132 | 132 |
| M | 141 | 141 | 148 | 182 | 182 |
| N | 150 | 150 | 160 | 225 | 225 |
| P | 100 | 120 | 175 | 225 | 275 |
| Q | 5 | 5 | 5 | 8 | 8 |
| R | 60 | 60 | 90 | 120 | 120 |
| S | 90 | 90 | 120 | 160 | 160 |
| V | V100 | V120 | V175 | V225 | V275 |
Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance）
Dimensions of MBV-ISO ADⅡ-M4
| Unit in:mm | |||||||
| Model | MBV-ISO50AD Ⅱ -M4-ARJ | MBV-ISO63AD Ⅱ -M4-ARJ | MBV-ISO80AD Ⅱ -M4-ARJ | MBV-ISO100AD Ⅱ -M4-ARJ | MBV-ISO160AD Ⅱ -M4-ARJ | MBV-ISO200AD Ⅱ -M4-ARJ | MBV-ISO250AD Ⅱ -M4-ARJ |
| MOD No. | 10866 □ | 10867 □ | 10867 □ | 10868 □ | 10870 □ | 10871 □ | 10872 □ |
| A | 30 | 30 | 30 | 30 | 50 | 50 | 50 |
| B | 52 | 68 | 81 | 104 | 158 | 209 | 258 |
| C | 110 | 130 | 145 | 165 | 225 | 285 | 335 |
| D | 120 | 145 | 160 | 185 | 235 | 300 | 350 |
| n —E | 4- φ 9 | 4- φ 9 | 8- φ 9 | 8- φ 9 | 8- φ 11 | 12- φ 11 | 12- φ 11 |
| F | 90 | 110 | 125 | 145 | 200 | 260 | 310 |
| G | 47 | 62 | 76 | 100 | 148 | 203 | 251 |
| H | 374 | 399.5 | 413.5 | 439 | 503 | 639 | 689 |
| J | 83.5 | 96 | 101.5 | 114 | 140.5 | 176.5 | 201.5 |
| K | 58.5 | 74.5 | 78 | 91 | 116.5 | 148.5 | 173.5 |
| L | 91 | 91 | 93 | 93 | 98 | 132 | 132 |
| M | 141 | 141 | 141 | 141 | 148 | 182 | 182 |
| N | 150 | 150 | 150 | 150 | 160 | 225 | 225 |
| R | 60 | 60 | 60 | 60 | 90 | 120 | 120 |
| S | 90 | 90 | 90 | 90 | 120 | 160 | 160 |
Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Dimensions of MBV-NW ADⅡ-M4
| Unit in:mm | |||||
| Model | MBV-NW50AD Ⅱ -M4-ARJ | MBV-NW63AD Ⅱ -M4-ARJ | MBV-NW80AD Ⅱ -M4-ARJ | MBV-NW100AD Ⅱ -M4-ARJ | MBV-NW160AD Ⅱ -M4-ARJ |
| MOD No. | 10825 □ | 10826 □ | 10827 □ | 10828 □ | 10830 □ |
| A | 40 | 40 | 60 | 60 | 66 |
| B | 52 | 68 | 81 | 104 | 158 |
| D | 75 | 87 | 114 | 134 | 190 |
| G | 36 | 56 | 55 | 84 | 140 |
| H | 374 | 399.5 | 413.5 | 439 | 503 |
| J | 83.5 | 96 | 101.5 | 114 | 140.5 |
| K | 58.5 | 71.5 | 78 | 91 | 116.5 |
| L | 91 | 91 | 93 | 93 | 98 |
| M | 141 | 141 | 141 | 141 | 148 |
| N | 150 | 150 | 150 | 150 | 160 |
| R | 60 | 60 | 60 | 60 | 90 |
| S | 90 | 90 | 90 | 90 | 120 |
Note1：When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps,
there are some cases where installing is impossible owing to their shape.
Dimensions of MBV-JIS ADⅡ-M4Br
| Unit in:mm | |||||
| Model | MBV-3AD Ⅱ -M4Br-ARJ | MBV-4AD Ⅱ -M4Br-ARJ | MBV-6AD Ⅱ -M4Br-ARJ | MBV-8AD Ⅱ -M4Br-ARJ | MBV-10AD Ⅱ -M4Br-ARJ |
| MOD No. | 10809 □ | 10810 □ | 10811 □ | 10812 □ | 10813 □ |
| A | 20 | 20 | 26 | 40 | 40 |
| B | 81 | 104 | 158 | 209 | 258 |
| C | 120 | 145 | 190 | 250 | 302 |
| D | 160 | 185 | 235 | 300 | 350 |
| n —E | 4- φ 12 | 8- φ 12 | 8- φ 12 | 8- φ 15 | 12- φ 15 |
| F | 135 | 160 | 210 | 270 | 320 |
| G | 80 | 102 | 154 | 206 | 254 |
| H | 450.5 | 476 | 540 | 676 | 726 |
| J | 101.5 | 114 | 140.5 | 176.5 | 201.5 |
| K | 78 | 91 | 116.5 | 148.5 | 173.5 |
| L | 93 | 93 | 98 | 132 | 132 |
| M | 178 | 178 | 185 | 219 | 219 |
| N | 150 | 150 | 160 | 225 | 225 |
| P | 100 | 120 | 175 | 225 | 275 |
| Q | 5 | 5 | 5 | 8 | 8 |
| R | 60 | 60 | 90 | 120 | 120 |
| S | 90 | 90 | 120 | 160 | 160 |
| V | V100 | V120 | V175 | V225 | V275 |
Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance）
Dimensions of MBV-ISO ADⅡ-M4Br
| Unit in:mm | |||||||
| Model | MBV-ISO50AD Ⅱ -M4Br-ARJ | MBV-ISO63AD Ⅱ -M4Br-ARJ | MBV-ISO80AD Ⅱ -M4Br-ARJ | MBV-ISO100AD Ⅱ -M4Br-ARJ | MBV-ISO160AD Ⅱ -M4Br-ARJ | MBV-ISO200AD Ⅱ -M4Br-ARJ | MBV-ISO250AD Ⅱ -M4Br-ARJ |
| MOD No. | 10866 □ | 10867 □ | 10867 □ | 10868 □ | 10870 □ | 10871 □ | 10872 □ |
| A | 30 | 30 | 30 | 30 | 50 | 50 | 50 |
| B | 52 | 68 | 81 | 104 | 158 | 209 | 258 |
| C | 110 | 130 | 145 | 165 | 225 | 285 | 335 |
| D | 120 | 145 | 160 | 185 | 235 | 300 | 350 |
| n —E | 4- φ 9 | 4- φ 9 | 8- φ 9 | 8- φ 9 | 8- φ 11 | 12- φ 11 | 12- φ 11 |
| F | 90 | 110 | 125 | 145 | 200 | 260 | 310 |
| G | 47 | 62 | 76 | 100 | 148 | 203 | 251 |
| H | 411 | 436 | 450.5 | 476 | 540 | 676 | 726 |
| J | 83.5 | 96 | 101.5 | 114 | 140.5 | 176.5 | 201.5 |
| K | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 |
| L | 91 | 91 | 93 | 93 | 98 | 132 | 132 |
| M | 178 | 178 | 178 | 178 | 185 | 219 | 219 |
| N | 150 | 150 | 150 | 150 | 160 | 225 | 225 |
| R | 60 | 60 | 60 | 60 | 90 | 120 | 120 |
| S | 90 | 90 | 90 | 90 | 120 | 160 | 160 |
Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Dimensions of MBV-NW ADⅡ-M4Br
| Unit in:mm | |||||
| Model | MBV-NW50AD Ⅱ -M4Br-ARJ | MBV-NW63AD Ⅱ -M4Br-ARJ | MBV-NW80AD Ⅱ -M4Br-ARJ | MBV-NW100AD Ⅱ -M4Br-ARJ | MBV-NW160AD Ⅱ -M4Br-ARJ |
| MOD No. | 10825 □ | 10826 □ | 10827 □ | 10828 □ | 10830 □ |
| A | 40 | 40 | 60 | 60 | 66 |
| B | 52 | 68 | 81 | 104 | 158 |
| D | 75 | 87 | 114 | 134 | 190 |
| G | 36 | 56 | 55 | 84 | 140 |
| H | 410.5 | 436 | 450.5 | 476 | 540 |
| J | 83.5 | 96 | 101.5 | 114 | 140.5 |
| K | 58.5 | 71.5 | 78 | 91 | 116.5 |
| L | 91 | 91 | 93 | 93 | 98 |
| M | 177.5 | 177.5 | 178 | 178 | 185 |
| N | 150 | 150 | 150 | 150 | 160 |
| R | 60 | 60 | 60 | 60 | 90 |
| S | 90 | 90 | 90 | 90 | 120 |
Note1：When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps,
there are some cases where installing is impossible owing to their shape.