Throttle Butterfly Valves SBVM-AX Ⅱ Series
Superior in cost performance
Advantage in the conductance
Thinnest thickness as vacuum valves, and the conductance is largest.
An efficient exhaust is enabled by the thinnest thickness to be increase the open conductance.
Throttle Butterfly Valves (SBVM Model)
◇Worm-wheel is mounted on the valves, Conductance can be changed freely by just turning knob.
And also can be used as a hand-manual valves which can fully shut and open.
◆By keeping constant pressure of vacuum chamber systems could exhaust flow control at main exhaust
line is the best. However, if it is necessary to control put conductance valve into the bypass piping and
the main exhaust line of small diameter , manually fix the valve opening at an arbitrary position butterfly
valve which can adjust the conductance of the conductance valve .
Basic specification
| STD Flange | ＪＩＳ・ＮＷ・ＩＳＯ・ＣＦ（ＳＢＶＭ） |
|---|---|
| ＪＩＳ・ＮＷ （ＢＶＭ） | |
| Leak Rate | ＜ １×１０-9Ｐａｍ3／ｓ |
| Pressure Range | １０5～１０-6Ｐａ |
| Disc seal | Viton O-ring |
| Shaft seal | Viton O-ring two-tier |
| Diameter | ２５Ａ～２５０Ａ（ＳＢＶＭ） |
|---|---|
| ２５Ａ～１５０Ａ（ＢＶＭ） | |
| Gas contact material | ＳＵＳ３０４ |
| Option | Microswitch |
| Angle indication Steering wheel lock |
※SBVM type can be attached with angle indication that can confirm the angle of valve disc and lock mechanism that can surely fix the middle position of valve disc.（fig-1）
※ The microswitch for an opening-and-closing display can be installed in an option. （fig‐2）
※ Please contact us as we can manufacture special sizes and special specifications.
※ To improve this specification may change without notice.
Dimensions of SBVM-JIS AXⅡSeries
| Unit in:mm | ||||||||
| Model | SBVM-1AXⅡ | SBVM-2AXⅡ | SBVM-2.5AXⅡ | SBVM-3AXⅡ | SBVM-4AXⅡ | SBVM-6AXⅡ | SBVM-8AXⅡ | SBVM-10AXⅡ |
| MOD No. | 10605□□ | 10607□□ | 10608□□ | 10609□□ | 10610□□ | 10611□□ | 10612□□ | 10613□□ |
| A | 20 | 20 | 20 | 20 | 20 | 26 | 40 | 40 |
| B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 |
| C | 58 | 88 | 105 | 120 | 145 | 190 | 250 | 302 |
| D | 90 | 120 | 145 | 160 | 185 | 235 | 300 | 350 |
| n—E | 4-φ10 | 4-φ10 | 4-φ12 | 4-φ12 | 8-φ12 | 8-φ12 | 8-φ15 | 12-φ15 |
| F | 70 | 100 | 120 | 135 | 160 | 210 | 270 | 320 |
| G | 33 | 52 | 67 | 80 | 102 | 154 | 206 | 254 |
| H | 127.5 | 158 | 183.5 | 201.5 | 227 | 288 | 370 | 436 |
| J | 59 | 74 | 86.5 | 101 | 113.5 | 138.5 | 176 | 201 |
| K | 43 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 |
| L | 157 | 157 | 157 | 178 | 198 | 235 | 294 | 294 |
| M | 80 | 80 | 95 | 90 | 130 | 150 | 144 | 144 |
| P | 40 | 70 | 85 | 100 | 120 | 175 | 225 | 275 |
| Q | 5 | 5 | 5 | 5 | 5 | 5 | 8 | 8 |
| R | 20 | 20 | 20 | 27.5 | 27.5 | 35 | 35 | 35 |
| S | 16 | 16 | 16 | 16 | 16 | 20 | 25 | 25 |
| V | V40 | V70 | V85 | V100 | V120 | V175 | V225 | V275 |
Note1：The above Flanges are accordance with older JIS 2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance）
Dimensions of SBVM-ISO AXⅡSeries
| Unit in:mm | ||||||||
| Model | SBVM- ISO40AXⅡ |
SBVM- ISO50AXⅡ |
SBVM- ISO63AXⅡ |
SBVM- ISO80AXⅡ |
SBVM- ISO100AXⅡ |
SBVM- ISO160AXⅡ |
SBVM- ISO200AXⅡ |
SBVM- ISO250AXⅡ |
| MOD No. | 10665□□ | 10666□□ | 10667□□ | 10667□□ | 10668□□ | 10670□□ | 10671□□ | 10672□□ |
| A | 30 | 30 | 30 | 30 | 30 | 50 | 50 | 50 |
| B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 |
| C | 100 | 110 | 130 | 145 | 165 | 225 | 285 | 335 |
| D | 120 | 120 | 145 | 160 | 185 | 235 | 300 | 350 |
| n—E | 4-φ9 | 4-φ9 | 4-φ9 | 8-φ9 | 8-φ9 | 8-φ11 | 12-φ11 | 12-φ11 |
| F | 80 | 90 | 110 | 125 | 145 | 200 | 260 | 310 |
| G | 23 | 47 | 62 | 76 | 100 | 148 | 203 | 251 |
| H | 158 | 158 | 183.5 | 201.5 | 227 | 288 | 370 | 436 |
| J | 74 | 74 | 86.5 | 101 | 113.5 | 138.5 | 176 | 201 |
| K | 58.5 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 |
| L | 157 | 157 | 157 | 178 | 198 | 235 | 294 | 294 |
| M | 80 | 80 | 95 | 90 | 130 | 150 | 144 | 144 |
| R | 20 | 20 | 20 | 27.5 | 27.5 | 35 | 35 | 35 |
| S | 16 | 16 | 16 | 16 | 16 | 20 | 25 | 25 |
Note1：The above Flanges are accordance with ISO 1609 uum technology Flange
Dimensions of SBVM-CF AXⅡSeries
| Unit in:mm | ||||||
| Model | SBVM- CF40AXⅡ | SBVM- CF63AXⅡ | SBVM- CF100AXⅡ | SBVM- CF160AXⅡ | SBVM- CF200AXⅡ | SBVM- CF250AXⅡ |
| MOD No. | 10640□□ | 10642□□ | 10644□□ | 10645□□ | 10647□□ | 10648□□ |
| A | 30 | 30 | 30 | 50 | 50 | 50 |
| B | 34 | 52 | 104 | 158 | 209 | 258 |
| C | 69.4 | 113.5 | 151.6 | 202.4 | 253.2 | 305.0 |
| D | 90 | 120 | 185 | 235 | 300 | 350 |
| n—E | 6-M6 | 8-M8 | 16-M8 | 20-M8 | 24-M8 | 32-M8 |
| F | 58.7 | 92.1 | 130.2 | 181 | 231.8 | 284 |
| G | 23 | 47 | 100 | 148 | 203 | 251 |
| H | 127.5 | 158 | 227 | 288 | 370 | 436 |
| J | 59 | 74 | 113.5 | 138.5 | 176 | 201 |
| K | 43 | 58.5 | 91 | 116.5 | 148.5 | 173.5 |
| L | 157 | 157 | 198 | 235 | 294 | 294 |
| M | 80 | 80 | 130 | 150 | 144 | 144 |
| R | 20 | 20 | 27.5 | 35 | 35 | 35 |
| S | 16 | 16 | 16 | 20 | 25 | 25 |
Note1：The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable flanges-Part2:Dimension of knife-edge flanges
Note3：No Groove for leakage detection no CF 40
Dimensions of SBVM-NW AXⅡSeries
| Unit in:mm | |||||
| Model | SBVM-NW40AXⅡ | SBVM-NW50AXⅡ | SBVM-NW63AXⅡ | SBVM-NW80AXⅡ | SBVM-NW100AXⅡ |
| MOD No. | 10624□□ | 10625□□ | 10626□□ | 10627□□ | 10628□□ |
| A | 40 | 40 | 40 | 60 | 60 |
| B | 34 | 52 | 68 | 81 | 104 |
| D | 55 | 75 | 87 | 114 | 134 |
| G | 0 | 36 | 56 | 55 | 84 |
| H | 127.5 | 158 | 183.5 | 201.5 | 227 |
| J | 59 | 74 | 86.5 | 101 | 113.5 |
| K | 43 | 58.5 | 71.5 | 78 | 91 |
| L | 157 | 157 | 157 | 178 | 198 |
| M | 80 | 80 | 95 | 90 | 130 |
| R | 20 | 20 | 20 | 27.5 | 27.5 |
| S | 16 | 16 | 16 | 16 | 16 |
Note1：When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases here installing is impossible owing to their shape.
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)