High-Perfomance Moter Drive Butterfly Valves MBV-LDⅡ-AZ Series

MBV-LDⅡ-AZ Series

Long-life, Low-price, High performance, Versatile running patterns

1.Long-life 1,000,000 cycles and two years guarantee
2.Low-price Automatic pressure control is made low-priced
3.High-performance Employs a high-performance stepping motor driver
4.High-functionality Full closing, Multi-position control, Auto pressure control
Equipped with an ABZO sensor, realizing a battery-less absolute system
Motor position-selected (four-position)

select from four types

MBV-LDⅡ-AZ-R

MBV-LDⅡ-AZ-L

MBV-LDⅡ-AZ-F

MBV-LDⅡ-AZ-B

Features

  • Full closing (shut-off valve) and conductance adjustment can be done by one unit.
    Minimum conductance-controlled is possible.
  • This valve can easily be opened under a differential pressure condition of vacuum-atmospheric pressure.
  • The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
  • In addition to fully closed and fully open, it can be stopped at any position of up to 14 positions. Position setting
    can be easily performed by installing support software on a PC.
  • By adding optional components for control, automatic pressure control valve can be used as.
  • The valve disc position can be confirmed from the outside by its angle indicator.
  • The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to install the
    exhaust system.
  • Fully closed position detecting sensor be included as standard.
  • Optional motor with brake is also available. (Model: MBV-LDII-AZBr)

Basic specification

STD FLANGE JIS・ISO・CF・NW
Leak Rate 1×10-9 Pa・m3/s >
Pressure Range 105 ~ 10-6 Pa
Disk seal Viton O-ring
Shaft seal Viton O-ring two-tier
Gas contact
material
SUS304
Diameter 20A ~ 300A※1
Driven
mechanism
Hybrid control system αSTEP ※2
Power DC power
supply

DC24V/DC48V 3.45A(3.7A)※4
AC power
supply
 ※3
Single-phase AC100-120V 5.4A
Single-phase AC200-240V 3.3A
Three-phase AC200-240V 2.0A

・Subject to change without any notice

・Please contact us as we can manufacture special sizes and special specifications.

※1 Diameter 150 A or higher is not compatible with DC power. AC power only.
※2 Hybrid control system αSTEP: Oriental Motor’s unique control that combines the advantages of “open-loop control” and “closed-loop control”
※3 Drivers with AC power specifications require a separate DC24V (0.25A) power supply for the control circuit.
※4  ( )Figures in parentheses are current values when a braked motor is used.

System configuration

System configuration

Attachment driver dimensional drawing

Attachment driver dimensional drawing

Valve model

◆Standard motor specifications

・MBV-□LDⅡ-AZ-△-KD Power input:DC24V/DC48V
・MBV-□LDⅡ-AZ-△-AD Power input:Single-phase AC100-120V
・MBV-□LDⅡ-AZ-△-CD Power input:Single-phase/Three-phase AC 200-240V

Motor specification with brake

・MBV-□LDⅡ-AZBr-△-KD Power input:DC24V/DC48V
・MBV-□LDⅡ-AZBr-△-AD Power input:AC 単相100-120V
・MBV-□LDⅡ-AZBr-△-CD Power input:AC 単相/三相200-240V

□:Flange type and diameter △:Motor mounting position(R・L・F・B)

Dimensions of MBV-JIS LDⅡ-AZ Series

Dimensions of MBV-JIS LDⅡ-AZ Series
Unit in:mm
Model MBV-1LDⅡ-AZ-□□ MBV-2LDⅡ-AZ-□□ MBV-2.5LDⅡ-AZ-□□ MBV-3LDⅡ-AZ-□□ MBV-4LDⅡ-AZ-□□ MBV-6LDⅡ-AZ-□□ MBV-8LDⅡ-AZ-□□ MBV-10LDⅡ-AZ-□□ MBV-12LDⅡ-AZ-□□
MOD No. 10705□□ 10707□□ 10708□□ 10709□□ 10710□□ 10711□□ 10712□□ 10713□□ 10714□□
A 20 20 20 20 20 26 40 40 45
B 34 52 68 81 104 158 209 258 308
C 58 88 105 120 145 190 250 302 352
D 90 120 145 160 185 235 300 350 400
n—E 4-φ10 4-φ10 4-φ12 4-φ12 8-φ12 8-φ12 8-φ15 12-φ15 12-φ15
F 70 100 120 135 160 210 270 320 370
G 33 52 67 80 102 154 206 254 303
H 228.5 259 284.5 298.5 324 388 455 505 555
J 115.5 130.5 143 150.5 163 194 229 254 279
K 43 58.5 71.5 78 91 116.5 148.5 173.5 198.5
L 55 55 49 49 55 70 85 85 85
M 271.5 271.5 272.5 272.5 273 290.5 291 291.5 291.5
P 40 70 85 100 120 175 225 275 325
Q 5 5 5 5 5 5 8 8 8
R 100 100 100 100 100 110 110 110 110
V V40 V70 V85 V100 V120 V175 V225 V275 V325

Note1:The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment
(Flange for affiliated book maintenance)
※ To improve this specification may change without notice.

Dimensions of MBV-ISO LDⅡ-AZ Series

Dimensions of MBV-ISO LDⅡ-AZ Series
Unit in:mm
Model MBV-ISO40LDⅡ-AZ-□□ MBV-ISO50LDⅡ-AZ-□□ MBV-ISO63LDⅡ-AZ-□□ MBV-ISO80LDⅡ-AZ-□□ MBV-ISO100LDⅡ-AZ-□□ MBV-ISO160LDⅡ-AZ-□□ MBV-ISO200LDⅡ-AZ-□□ MBV-ISO250LDⅡ-AZ-□□
MOD No. 10765□□ 10766□□ 10767□□ 10767□□ 10768□□ 10770□□ 10771□□ 10772□□
A 30 30 30 30 30 50 50 50
B 34 52 68 81 104 158 209 258
C 100 110 130 145 165 225 285 335
D 120 120 145 160 185 235 300 350
n—E 4-φ9 4-φ9 4-φ9 8-φ9 8-φ9 8-φ11 12-φ11 12-φ11
F 80 90 110 125 145 200 260 310
G 23 47 62 76 100 148 203 251
H 259 259 284.5 298.5 324 388 455 505
J 130.5 130.5 143 150.5 163 194 229 254
K 58.5 58.5 71.5 78 91 116.5 148.5 173.5
L 55 55 49 49 55 70 85 85
M 271.5 271.5 272.5 272.5 273 290.5 291 291.5
R 100 100 100 100 100 110 110 110

Note1:The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
※ To improve this specification may change without notice.

Dimensions of MBV-CF LDⅡ-AZ Series

Dimensions of MBV-CF LDⅡ-AZ Series
Unit in:mm
Model MBV-CF40LDⅡ-AZ-□□ MBV-CF63LDⅡ-AZ-□□ MBV-CF100LDⅡ-AZ-□□ MBV-CF160LDⅡ-AZ-□□ MBV-CF200LDⅡ-AZ-□□ MBV-CF250LDⅡ-AZ-□□
MOD No. 10740□□ 10742□□ 10744□□ 10745□□ 10747□□ 10748□□
A 30 30 30 50 50 50
B 34 52 104 158 209 258
C 69.4 113.5 151.6 202.4 253.2 305.0
D 90 120 185 235 300 350
n—E 6-M6 8-M8 16-M8 20-M8 24-M8 32-M8
F 58.7 92.1 130.2 181 231.8 284
G 23 47 100 148 203 251
H 228.5 259 324 388 455 505
J 115.5 130.5 163 194 229 254
K 43 58.5 91 116.5 148.5 173.5
L 55 55 55 70 85 85
M 271.5 271.5 273 290.5 291 291.5
R 100 100 100 110 110 110

Note1:The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable
flanges-Part2:Dimension of knife-edge flanges
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:No Groove for leakage detection no CF 40
Note4:MBV-CF160~CF250LDII does not support DC power supply.
※ To improve this specification may change without notice.

Dimensions of MBV-NW LDⅡ-AZ Series

Dimensions of MBV-NW LDⅡ-AZ Series
Unit in:mm
Model MBV-NW40LDⅡ-AZ-□□ MBV-NW50LDⅡ-AZ-□□ MBV-NW63LDⅡ-AZ-□□ MBV-NW80LDⅡ-AZ-□□ MBV-NW100LDⅡ-AZ-□□ MBV-NW160LDⅡ-AZ-□□
MOD No. 10724□□ 10725□□ 10726□□ 10727□□ 10728□□ 10730□□
A 40 40 40 60 60 66
B 34 52 68 81 104 158
D 55 75 87 114 134 190
G 0 36 56 55 84 140
H 228.5 259 284.5 298.5 324 388
J 115.5 130.5 143 150.5 163 194
K 43 58.5 71.5 78 91 116.5
L 55 55 49 49 55 70
M 271.5 271.5 272.5 272.5 273 290.5
R 100 100 100 100 100 110

Note1:When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:MBV-NW160LDII does not support DC power supply.
※ To improve this specification may change without notice.

Dimensions of MBV-JIS LDⅡ-AZBr Series

Dimensions of MBV-JIS LDⅡ-AZBr Series
Unit in:mm
Model MBV-1LDⅡ-AZBr-□□ MBV-2LDⅡ-AZBr-□□ MBV-2.5LDⅡ-AZBr-□□ MBV-3LDⅡ-AZBr-□□ MBV-4LDⅡ-AZBr-□□ MBV-6LDⅡ-AZBr-□□ MBV-8LDⅡ-AZBr-□□ MBV-10LDⅡ-AZBr-□□ MBV-12LDⅡ-AZBr-□□
MOD No. 10705□□ 10707□□ 10708□□ 10709□□ 10710□□ 10711□□ 10712□□ 10713□□ 10714□□
A 20 20 20 20 20 26 40 40 45
B 34 52 68 81 104 158 209 258 308
C 58 88 105 120 145 190 250 302 352
D 90 120 145 160 185 235 300 350 400
n—E 4-φ10 4-φ10 4-φ12 4-φ12 8-φ12 8-φ12 8-φ15 12-φ15 12-φ15
F 70 100 120 135 160 210 270 320 370
G 33 52 67 80 102 154 206 254 303
H 228.5 259 284.5 298.5 324 388 455 505 555
J 115.5 130.5 143 150.5 163 194 229 254 279
K 43 58.5 71.5 78 91 116.5 148.5 173.5 198.5
L 55 55 49 49 55 70 85 85 85
M 317.5 317.5 318.5 318.5 319 336.5 337 337.5 337.5
P 40 70 85 100 120 175 225 275 325
Q 5 5 5 5 5 5 8 8 8
R 100 100 100 100 100 110 110 110 110
V V40 V70 V85 V100 V120 V175 V225 V275 V325

Note1:The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment
(Flange for affiliated book maintenance)
※ To improve this specification may change without notice.

Dimensions of MBV-ISO LDⅡ-AZBr Series

Dimensions of MBV-ISO LDⅡ-AZBr Series
Unit in:mm
Model MBV-ISO40LDⅡ-AZBr-□□ MBV-ISO50LDⅡ-AZBr-□□ MBV-ISO63LDⅡ-AZBr-□□ MBV-ISO80LDⅡ-AZBr-□□ MBV-ISO100LDⅡ-AZBr-□□ MBV-ISO160LDⅡ-AZBr-□□ MBV-ISO200LDⅡ-AZBr-□□ MBV-ISO250LDⅡ-AZBr-□□
MOD No. 10765□□ 10766□□ 10767□□ 10767□□ 10768□□ 10770□□ 10771□□ 10772□□
A 30 30 30 30 30 50 50 50
B 34 52 68 81 104 158 209 258
C 100 110 130 145 165 225 285 335
D 120 120 145 160 185 235 300 350
n—E 4-φ9 4-φ9 4-φ9 8-φ9 8-φ9 8-φ11 12-φ11 12-φ11
F 80 90 110 125 145 200 260 310
G 23 47 62 76 100 148 203 251
H 259 259 284.5 298.5 324 388 455 505
J 130.5 130.5 143 150.5 163 194 229 254
K 58.5 58.5 71.5 78 91 116.5 148.5 173.5
L 55 55 49 49 55 70 85 85
M 317.5 317.5 318.5 318.5 319 336.5 337 337.5
R 100 100 100 100 100 110 110 110

Note1:The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
※ To improve this specification may change without notice.

Dimensions of MBV-CF LDⅡ-AZBr Series

Dimensions of MBV-CF LDⅡ-AZBr Series
Unit in:mm
Model MBV-CF40LDⅡ-AZBr-□□ MBV-CF63LDⅡ-AZBr-□□ MBV-CF100LDⅡ-AZBr-□□ MBV-CF160LDⅡ-AZBr-□□ MBV-CF200LDⅡ-AZBr-□□ MBV-CF250LDⅡ-AZBr-□□
MOD No. 10740□□ 10742□□ 10744□□ 10745□□ 10747□□ 10748□□
A 30 30 30 50 50 50
B 34 52 104 158 209 258
C 69.4 113.5 151.6 202.4 253.2 305.0
D 90 120 185 235 300 350
n—E 6-M6 8-M8 16-M8 20-M8 24-M8 32-M8
F 58.7 92.1 130.2 181 231.8 284
G 23 47 100 148 203 251
H 228.5 259 324 388 455 505
J 115.5 130.5 163 194 229 254
K 43 58.5 91 116.5 148.5 173.5
L 55 55 55 70 85 85
M 317.5 317.5 319 336.5 337 337.5
R 100 100 100 110 110 110

Note1:The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable flanges-Part2:Dimension of knife-edge flanges
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:No Groove for leakage detection no CF 40
Note4:MBV-CF160~CF250LDII does not support DC power supply.
※ To improve this specification may change without notice.

Dimensions of MBV-NW LDⅡ-AZBr Series

Dimensions of MBV-NW LDⅡ-AZBr Series
Unit in:mm
Model MBV-NW40LDⅡ-AZBr-□□ MBV-NW50LDⅡ-AZBr-□□ MBV-NW63LDⅡ-AZBr-□□ MBV-NW80LDⅡ-AZBr-□□ MBV-NW100LDⅡ-AZBr-□□ MBV-NW160LDⅡ-AZBr-□□
MOD No. 10724□□ 10725□□ 10726□□ 10727□□ 10728□□ 10730□□
A 40 40 40 60 60 66
B 34 52 68 81 104 158
D 55 75 87 114 134 190
G 0 36 56 55 84 140
H 228.5 259 284.5 298.5 324 388
J 115.5 130.5 143 150.5 163 194
K 43 58.5 71.5 78 91 116.5
L 55 55 49 49 55 70
M 317.5 317.5 318.5 318.5 319 336.5
R 100 100 100 100 100 110

Note1:When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:MBV-NW160LDII does not support DC power supply.
※ To improve this specification may change without notice.