Motor Driven Butterfly Valve MBV-LDⅡ-M4-ARJSeries

MBV-LDⅡ-M4-ARJSeries

Long-life, Low-price, High performance, Versatile running patterns

１．Long-life　1,000,000 cycles and two years guarantee
２．Low-price　 Automatic pressure control is made low-priced
３．High-performance　 Adopt high performance servomotor and new driven mechanism
４．High-functionality　Full closing, Multi-position control, Auto pressure control

Motor position-selected （four-position）

 select from four types

MBV-LDⅡ-M4-R

MBV-LDⅡ-M4-L

MBV-LDⅡ-M4-F

MBV-LDⅡ-M4-B

Features

◇ Full closing (shut-off valve) and conductance adjustment can be done by one unit.
Minimum conductance-controlled is possible.
◆ This valve can easily be opened under a differential pressure condition of vacuum-atmospheric pressure.
◇ The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
◆ The position of half open can be beforehand set up by PC software or the main part of servo amplifier, and can be made for a maximum of 13 positions to memorize.
◇ By adding optional components for control, automatic pressure control valve can be used as.
◆ The valve disc position can be confirmed from the outside by its angle indicator.
◇ The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to install the exhaust system.
◆ Fully closed position detecting sensor be included as standard.
◇ Optional motor with brake is also available. (Model: MBV-LDII-M4Br-ARJ)

About the motor correspondence of those other than a standard

We will consult also about change on motors according to the equipment usage environment of your company, such as servo
motors other than a standard motor.

Basic specification

STD FLANGE ＪＩＳ・ＩＳＯ・ＣＦ・ＮＷ
Leak Rate １×１０-9　Ｐａ・ｍ3／ｓ 以下
Pressure Range １０5～１０-6 Ｐａ
Disc seal Viton O-ring
Shaft seal Viton O-ring two-tier
Diameter ２５Ａ ～３００Ａ
Power supply：DC 24V（max 3.0A ）
control：DC 24V（max 0.2A ）
Driven mechanism AC servo-motor
Gas contact
material		 ＳＵＳ３０４

※Subject to change without any notice
※Please contact us as we can manufacture special sizes and special specifications.

※ To improve this specification may change without notice.

System configuration

System configuration

※Included in the valve unit：Valve body、Servo-motor、Servo-amplifier
（Please refer to the “optional selection list” other than those above.）

Equipped sevo-amplifier dimensions

Equipped sevo-amplifier dimensions

Dimensions of MBV-JIS LDⅡ-M4 Series

Dimensions of MBV-JIS LDⅡ-M4 Series
Unit in:mm
Model MBV-1LDⅡ-M4-ARJ MBV-2LDⅡ-M4-ARJ MBV-2.5LDⅡ-M4-ARJ MBV-3LDⅡ-M4-ARJ MBV-4LDⅡ-M4-ARJ MBV-6LDⅡ-M4-ARJ MBV-8LDⅡ-M4-ARJ MBV-10LDⅡ-M4-ARJ MBV-12LDⅡ-M4-ARJ
MOD No. 10705□□ 10707□□ 10708□□ 10709□□ 10710□□ 10711□□ 10712□□ 10713□□ 10714□□
A 20 20 20 20 20 26 40 40 45
B 34 52 68 81 104 158 209 258 308
C 58 88 105 120 145 190 250 302 352
D 90 120 145 160 185 235 300 350 400
n—E 4-φ10 4-φ10 4-φ12 4-φ12 8-φ12 8-φ12 8-φ15 12-φ15 12-φ15
F 70 100 120 135 160 210 270 320 370
G 33 52 67 80 102 154 206 254 303
H 228.5 259 284.5 298.5 324 388 455 505 555
J 115.5 130.5 143 150.5 163 194 229 254 279
K 43 58.5 71.5 78 91 116.5 148.5 173.5 198.5
L 55 55 49 49 55 70 85 85 85
M 227 227 228 228 228.5 246 246.5 247 247
P 40 70 85 100 120 175 225 275 325
Q 5 5 5 5 5 5 8 8 8
R 100 100 100 100 100 110 110 110 110
V V40 V70 V85 V100 V120 V175 V225 V275 V325

Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance）
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)

Dimensions of MBV-ISO LDⅡ-M4Series

Dimensions of MBV-ISO LDⅡ-M4Series
Unit in:mm
Model MBV-ISO40LDⅡ-M4-ARJ MBV-ISO50LDⅡ-M4-ARJ MBV-ISO63LDⅡ-M4-ARJ MBV-ISO80LDⅡ-M4-ARJ MBV-ISO100LDⅡ-M4-ARJ MBV-ISO160LDⅡ-M4-ARJ MBV-ISO200LDⅡ-M4-ARJ MBV-ISO250LDⅡ-M4-ARJ
MOD No. 10765□□ 10766□□ 10767□□ 10767□□ 10768□□ 10770□□ 10771□□ 10772□□
A 30 30 30 30 30 50 50 50
B 34 52 68 81 104 158 209 258
C 100 110 130 145 165 225 285 335
D 120 120 145 160 185 235 300 350
n—E 4-φ9 4-φ9 4-φ9 8-φ9 8-φ9 8-φ11 12-φ11 12-φ11
F 80 90 110 125 145 200 260 310
G 23 47 62 76 100 148 203 251
H 259 259 284.5 298.5 324 388 455 505
J 130.5 130.5 143 150.5 163 194 229 254
K 58.5 58.5 71.5 78 91 116.5 148.5 173.5
L 55 55 49 49 55 70 85 85
M 227 227 228 228 228.5 246 246.5 247
R 100 100 100 100 100 110 110 110

Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)

Dimensions of MBV-CF LDⅡ-M4 Series

Dimensions of MBV-CF LDⅡ-M4 Series
Unit in:mm
Model MBV-CF40LDⅡ-M4-ARJ MBV-CF63LDⅡ-M4-ARJ MBV-CF100LDⅡ-M4-ARJ MBV-CF160LDⅡ-M4-ARJ MBV-CF200LDⅡ-M4-ARJ MBV-CF250LDⅡ-M4-ARJ
MOD No. 10740□□ 10742□□ 10744□□ 10745□□ 10747□□ 10748□□
A 30 30 30 50 50 50
B 34 52 104 158 209 258
C 69.4 113.5 151.6 202.4 253.2 305.0
D 90 120 185 235 300 350
n—E 6-M6 8-M8 16-M8 20-M8 24-M8 32-M8
F 58.7 92.1 130.2 181 231.8 284
G 23 47 100 148 203 251
H 228.5 259 324 388 455 505
J 115.5 130.5 163 194 229 254
K 43 58.5 91 116.5 148.5 173.5
L 55 55 55 70 85 85
M 227 227 228.5 246 246.5 247
R 100 100 100 110 110 110

Note1：The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable flanges-Part2:Dimension of knife-edge flanges
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)
Note3：No Groove for leakage detection no CF 40

Dimensions of MBV-NW LDⅡ-M4 Series

Dimensions of MBV-NW LDⅡ-M4 Series
Unit in:mm
Model MBV-NW40LDⅡ-M4-ARJ MBV-NW50LDⅡ-M4-ARJ MBV-NW63LDⅡ-M4-ARJ MBV-NW80LDⅡ-M4-ARJ MBV-NW100LD-M4-ARJ MBV-NW160LD-M4-ARJ
MOD No. 10724□□ 10725□□ 10726□□ 10727□□ 10728□□ 10730□□
A 40 40 40 60 60 66
B 34 52 68 81 104 158
D 55 75 87 114 134 190
G 0 36 56 55 84 140
H 228.5 259 284.5 298.5 324 388
J 115.5 130.5 143 150.5 163 194
K 43 58.5 71.5 78 91 116.5
L 55 55 49 49 55 70
M 227 227 228 228 228.5 246
R 100 100 100 100 100 110

Note1：When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)

Dimensions of MBV-JIS LDⅡ-M4Br Series

Dimensions of MBV-JIS LDⅡ-M4Br Series
Unit in:mm
Model MBV-1LDⅡ-M4Br-ARJ MBV-2LDⅡ-M4Br-ARJ MBV-2.5LDⅡ-M4Br-ARJ MBV-3LDⅡ-M4Br-ARJ MBV-4LDⅡ-M4Br-ARJ MBV-6LDⅡ-M4Br -ARJ MBV-8LDⅡ-M4Br -ARJ MBV-10LDⅡ-M4Br -ARJ MBV-12LDⅡ-M4Br-ARJ
MOD No. 10705□□ 10707□□ 10708□□ 10709□□ 10710□□ 10711□□ 10712□□ 10713□□ 10714□□
A 20 20 20 20 20 26 40 40 45
B 34 52 68 81 104 158 209 258 308
C 58 88 105 120 145 190 250 302 352
D 90 120 145 160 185 235 300 350 400
n—E 4-φ10 4-φ10 4-φ12 4-φ12 8-φ12 8-φ12 8-φ15 12-φ15 12-φ15
F 70 100 120 135 160 210 270 320 370
G 33 52 67 80 102 154 206 254 303
H 228.5 259 284.5 298.5 324 388 455 505 555
J 115.5 130.5 143 150.5 163 194 229 254 279
K 43 58.5 71.5 78 91 116.5 148.5 173.5 198.5
L 55 55 49 49 55 70 85 85 85
M 263.5 263.5 264.5 264.5 265 282.5 283 283.5 283.5
P 40 70 85 100 120 175 225 275 325
Q 5 5 5 5 5 5 8 8 8
R 100 100 100 100 100 110 110 110 110
V V40 V70 V85 V100 V120 V175 V225 V275 V325

Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance）
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)

Dimensions of MBV-ISO LDⅡ-M4Br Series

Dimensions of MBV-ISO LDⅡ-M4Br Series
Unit in:mm
Model MBV-ISO40LDⅡ-M4Br-ARJ MBV-ISO50LDⅡ-M4Br-ARJ MBV-ISO63LDⅡ-M4Br-ARJ MBV-ISO80LDⅡ-M4Br-ARJ MBV-ISO100LDⅡ-M4Br-ARJ MBV-ISO160LDⅡ-M4Br-ARJ MBV-ISO200LDⅡ-M4Br-ARJ MBV-ISO250LDⅡ-M4Br-ARJ
MOD No. 10765□□ 10766□□ 10767□□ 10767□□ 10768□□ 10770□□ 10771□□ 10772□□
A 30 30 30 30 30 50 50 50
B 34 52 68 81 104 158 209 258
C 100 110 130 145 165 225 285 335
D 120 120 145 160 185 235 300 350
n—E 4-φ9 4-φ9 4-φ9 8-φ9 8-φ9 8-φ11 12-φ11 12-φ11
F 80 90 110 125 145 200 260 310
G 23 47 62 76 100 148 203 251
H 259 259 284.5 298.5 324 388 455 505
J 130.5 130.5 143 150.5 163 194 229 254
K 58.5 58.5 71.5 78 91 116.5 148.5 173.5
L 55 55 49 49 55 70 85 85
M 263.5 263.5 264.5 264.5 265 282.5 283 283.5
R 100 100 100 100 100 110 110 110

Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)

Dimensions of MBV-CF LDⅡ-M4Br Series

Dimensions of MBV-CF LDⅡ-M4Br Series
Unit in:mm
Model MBV-CF40LDⅡ-M4Br-ARJ MBV-CF63LDⅡ-M4Br-ARJ MBV-CF100LDⅡ-M4Br-ARJ MBV-CF160LDⅡ-M4Br-ARJ MBV-CF200LDⅡ-M4Br-ARJ MBV-CF250LDⅡ-M4Br-ARJ
MOD No. 10740□□ 10742□□ 10744□□ 10745□□ 10747□□ 10748□□
A 30 30 30 50 50 50
B 34 52 104 158 209 258
C 69.4 113.5 151.6 202.4 253.2 305.0
D 90 120 185 235 300 350
n—E 6-M6 8-M8 16-M8 20-M8 24-M8 32-M8
F 58.7 92.1 130.2 181 231.8 284
G 23 47 100 148 203 251
H 228.5 259 324 388 455 505
J 115.5 130.5 163 194 229 254
K 43 58.5 91 116.5 148.5 173.5
L 55 55 55 70 85 85
M 263.5 263.5 265 282.5 283 283.5
R 100 100 100 110 110 110

Note1：The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable flanges-Part2:Dimension of knife-edge flanges
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)
Note3：No Groove for leakage detection no CF 40

Dimensions of MBV-NW LDⅡ-M4Br Series

Dimensions of MBV-NW LDⅡ-M4Br Series
Unit in:mm
Model MBV-NW40LDⅡ-M4Br-ARJ MBV-NW50LDⅡ-M4Br-ARJ MBV-NW63LDⅡ-M4Br-ARJ MBV-NW80LDⅡ-M4Br-ARJ MBV-NW100LDⅡ-M4Br-ARJ MBV-NW160LDⅡ-M4Br-ARJ
MOD No. 10724□□ 10725□□ 10726□□ 10727□□ 10728□□ 10730□□
A 40 40 40 60 60 66
B 34 52 68 81 104 158
D 55 75 87 114 134 190
G 0 36 56 55 84 140
H 228.5 259 284.5 298.5 324 388
J 115.5 130.5 143 150.5 163 194
K 43 58.5 71.5 78 91 116.5
L 55 55 49 49 55 70
M 263.5 263.5 264.5 264.5 265 282.5
R 100 100 100 100 100 110

Note1：When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
Note2：A motor position type enters in ( ) of form. (It chooses from four positions)

＜Option＞Dual Controller FPC-181S（M4-ARJ）

（MBV-SDⅡ-M4-ARJ/MBV-LDⅡ-M4-ARJ/MBV-ADⅡ－M4-ARJ/MEX-LD-M4-ARJ)

  • １．ECN cable（load -side ／anti-load-side）

    Cables for connecting the servo amplifier and valve
    Modele length (L)
    ECN cable (load -side）2ｍ_4123500 2m
    ECN cable (load -side）5ｍ_4123501 5m
    ECN cable (load -side）10ｍ_4123502 10m
    ECN cable(anti-load-side）2ｍ_4123505 2m
    ECN cable(anti-load-side）5ｍ_4123506 5m
    ECN cable(anti-load-side）10ｍ_4123507 10m
    Left:load-side-lead Right:opposite to load-side-lead

  • ２．MOTpower cable（load -side ／anti-load-side）

    Cables for connecting the servo amplifier and valve *It is not ashield cable
    Modele length (L)
    MOT cable（load -side）2ｍ_4123520 2m
    MOT cable（load -side）5ｍ_4123521 5m
    MOT cable（load -side）10ｍ_4123522 10m
    MOT cable（anti-load-side）2ｍ_4123525 2m
    MOT cable（anti-load-side）5ｍ_4123526 5m
    MOT cable（anti-load-side10ｍ_4123527 10m
    *It is not a shield cable

  • ３．Electromagnetic brake cable（load -side ／anti-load-side）

    Servo motor cable with electromagnetic brake. *It is not ashield cable
    Modele length (L)
    Br cable（load-side）2ｍ_4123540 2m
    Br cable（load-side）5ｍ_4123541 5m
    Br cable（load-side）10ｍ_4123542 10m
    Br cable（anti-load-side）2ｍ_4123545 2m
    Br cable（anti-load-side）5ｍ_4123546 5m
    Br cable（anti-load-side）10ｍ_4123547 10m
    *It is not a shield cable

  • ４．SPT-M cable

    Cables for connecting the servo amplifier and controller
    Modele length (L)
    SPT-M cable_4123051(1.0/0.15ｍ) 1.0/0.15ｍ

  • ５．Analog I/O cable

    Cable for Analog I/O to controller (Using 2 axis, 2cables are needed) *shield cable
    Modele length (L)
    Analog I/O cable_4123314 (2m) 2m
    Analog I/O cable_4123315(3m) 3m
    Analog I/O cable_4123316(5m) 5m
    *shield cable

  • ６．-１ REMOTE I/F F cable

    Cable for Remote I/O to controller (Flat cable)
    Modele length (L)
    REMOTE I/F F cable_4123335（1m） 1m
    REMOTE I/F F cable_4123336（2m） 2m
    REMOTE I/F F cable_4123337（3m） 3m
    REMOTE I/F F cable_4123338（4m） 4m
    REMOTE I/F F cable_4123339（5m） 5m

  • ６．-2 REMOTE I/F cable

    Cable for Remote I/O to controller
    Modele length (L)
    REMOTE I/F cable_4123325（1m） 1m
    REMOTE I/F cable_4123326（2m） 2m
    REMOTE I/F cable_4123327（3m） 3m
    REMOTE I/F cable_4123328（4m） 4m
    REMOTE I/F cable_4123329（5m） 5m
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