Multi-Position・Motor Drive・Compact Gate Valve MEX-LD-M4-ARJ Series
Our original drive system has superior cost performance
1.Low-price Automatic pressure control is made low-priced
2.High-performance Adopt high performance servomotor and new driven mechanism
3.High-functionality Full closing, Multi-position control, Auto pressure control
Motor position-selected （three-position）
select from three types
MEX-LD-M4-R
MEX-LD-M4-L
MEX-LD-M4-F
Features
◇ Full closing (shut-off valve) and conductance adjustment can be done by one unit.
◆ The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
◇ This valve can be stopped at any position of maximum 14- position and at the fully closed, fully open.
Positioning settings can be done easily with the teaching box or PC software.
◆ By adding optional components for control, automatic pressure control valve can be used as.
◇ The valve disc position can be confirmed from the outside by its angle indicator.
◆ The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to install
the exhaust system.
◇ Fully closed and fully open position detecting sensor can be equipped as an option.
Basic specification
| STD FLANGE | ＪＩＳ・ＩＳＯ・ＣＦ |
|---|---|
| Leak Rate | Housing １×１０-11 Ｐａ ｍ3／ｓ ＞ Valve seat １×１０-10 Ｐａ ｍ3／ｓ ＞ |
| Pressure Range | １０-5～１０-6 Ｐａ |
| Stem Seal | Viton O-ring |
| Diameter | ７０～４００（ｍｍ） |
|---|---|
| Power | Power ＤＣ２４Ｖ （max 3.0A ） supply Control power ＤＣ２４Ｖ （max 3.0A ） |
| Driven mechanism | AC servo-motor （built-in encoder） |
| Main material | ＳＵＳ３０４ |
※ Subject to change without any notice
※ Please contact us as we can manufacture special sizes and special specifications.
※ The diameter is limited to the mounting direction. Please inquire our sales.
※To improve this specification may change without notice.
System configuration
※ Included in the valve unit：Valve body、Servo-motor、Servo-amplifier
（Please refer to the “optional selection list” other than those above.）
Equipped sevo-amplifier dimensions
About the motor correspondence of those other than a standard
We will consult also about change on motors according to the equipment usage environment of your company, such as
servo motors other than a standard motor.
Dimensions of MEX-JIS-LD-M4Series
| Unit in: mm | ||||||||
| Model | MEX-80JIS-LD-M4-ARJ | MEX-100JIS-LD-M4-ARJ | MEX-150JIS-LD-M4-ARJ | MEX-200JIS-LD-M4-ARJ | MEX-250JIS-LD-M4-ARJ | MEX-300JIS-LD-M4-ARJ | MEX-350JIS-LD-M4-ARJ | MEX-400JIS-LD-M4-ARJ |
| Diameter | 80 | 100 | 150 | 200 | 250 | 300 | 350 | 400 |
| MOD No | 16709□□ | 16710□□ | 16711□□ | 16712□□ | 16713□□ | 16714□□ | 16714□□ | 16715□□ |
| A | 70 | 70 | 80 | 80 | 85 | 85 | 100 | 100 |
| B | 80 | 100 | 150 | 200 | 250 | 300 | 350 | 400 |
| D | 160 | 185 | 235 | 300 | 350 | 400 | 450 | 520 |
| n—E | 4-M10 | 8-M10 | 8-M10 | 8-M12 | 12-M12 | 12-M12 | 12-M12 | 12-M16 |
| F | 14 | 14 | 14 | 15 | 16 | 16 | 18 | 18 |
| G | 135 | 160 | 210 | 270 | 320 | 370 | 420 | 480 |
| H | 314.5 | 314.5 | 401.5 | 541 | 654 | 752 | 916 | 1023 |
| J | 150 | 150 | 192 | 254 | 305 | 356 | 433 | 483 |
| L | 227 | 227 | 227 | 244 | 244 | 244 | 244 | 244 |
| M | 105 | 105 | 105 | 116 | 120 | 121 | 128 | 129 |
| Q | 174 | 174 | 174 | 192 | 196 | 197 | 204 | 205 |
| R | 110 | 110 | 110 | 140 | 140 | 140 | 140 | 140 |
| T | 180 | 180 | 235 | 308 | 380 | 430 | 512 | 560 |
| U | 158 | 158 | 210 | 284 | 348 | 402 | 480 | 528 |
| V | 60 | 60 | 60 | 60 | 72 | 72 | 80 | 82 |
| W | 79 | 79 | 99 | 135 | 165 | 190 | 231 | 255 |
Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance）
Note2：A motor position type enters in ( ) of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
Dimensions of MEX-ISO-LD-M4 Series
| Unit in: mm | |||||||
| Model | MEX-80ISO-LD-M4-ARJ | MEX-100ISO-LD-M4-ARJ | MEX-150ISO-LD-M4-ARJ | MEX-200ISO-LD-M4-ARJ | MEX-250ISO-LD-M4-ARJ | MEX-300ISO-LD-M4-ARJ | MEX-400ISO-LD-M4-ARJ |
| Diameter | 80 | 100 | 150 | 200 | 250 | 300 | 400 |
| MOD No | 16767□□ | 16768□□ | 16770□□ | 16771□□ | 16772□□ | 16773□□ | 16774□□ |
| A | 70 | 70 | 80 | 80 | 85 | 85 | 100 |
| B | 80 | 100 | 150 | 200 | 250 | 300 | 400 |
| C | 83 | 102 | 153 | 213 | 261 | 318 | 400 |
| D | 145 | 165 | 225 | 285 | 335 | 425 | 510 |
| n—E | 8-M8 | 8-M8 | 8-M10 | 12-M10 | 12-M10 | 12-M12 | 16-M12 |
| F | 14 | 14 | 14 | 15 | 16 | 16 | 18 |
| G | 125 | 145 | 200 | 260 | 310 | 395 | 480 |
| H | 314.5 | 314.5 | 401.5 | 541 | 654 | 752 | 1023 |
| J | 150 | 150 | 192 | 254 | 305 | 356 | 483 |
| L | 227 | 227 | 227 | 244 | 244 | 244 | 244 |
| M | 105 | 105 | 105 | 116 | 120 | 121 | 129 |
| Q | 174 | 174 | 174 | 192 | 196 | 197 | 205 |
| R | 110 | 110 | 110 | 140 | 140 | 140 | 140 |
| T | 180 | 180 | 235 | 308 | 380 | 430 | 560 |
| U | 158 | 158 | 210 | 284 | 348 | 402 | 528 |
| V | 60 | 60 | 60 | 60 | 72 | 72 | 82 |
| W | 79 | 79 | 99 | 135 | 165 | 190 | 255 |
Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
Dimensions of MEX-CF-LD Series
| Unit in: mm | |||||
| Model | MEX-70CF-LD-M4-ARJ | MEX-100CF-LD-M4-ARJ | MEX-150CF-LD-M4-ARJ | MEX-200CF-LD-M4-ARJ | MEX-250CF-LD-M4-ARJ |
| Diameter | 70 | 100 | 150 | 200 | 250 |
| MOD No | 16743□□ | 16744□□ | 16745□□ | 16746□□ | 16747□□ |
| CF flange size | CF114 | CF152 | CF203 | CF253 | CF305 |
| A | 70 | 70 | 80 | 80 | 100 |
| B | 70 | 100 | 150 | 200 | 250 |
| D | 113.5 | 151.6 | 202.4 | 253.2 | 306 |
| n—E | 8-M8 | 16-M8 | 20-M8 | 24-M8 | 32-M8 |
| F | 14 | 14 | 14 | 16 | 23 |
| G | 92.1 | 130.2 | 181 | 231.8 | 284 |
| H | 314.5 | 314.5 | 401.5 | 541 | 654 |
| J | 150 | 150 | 192 | 254 | 305 |
| L | 227 | 227 | 227 | 244 | 244 |
| M | 105 | 105 | 105 | 116 | 120 |
| Q | 174 | 174 | 174 | 192 | 196 |
| R | 110 | 110 | 110 | 140 | 140 |
| T | 180 | 180 | 235 | 308 | 380 |
| U | 158 | 158 | 210 | 284 | 348 |
| V | 60 | 60 | 60 | 60 | 72 |
| W | 79 | 79 | 99 | 135 | 165 |
Note1 The above Flanges are accordance with ISO 3669 Vacuum technology-Bakable Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
＜Option＞Dual Controller FPC-181S（M4-ARJ）
１．ECN cable（load -side ／anti-load-side）
Cables for connecting the servo amplifier and valveModele length (L) ECN cable (load -side）2ｍ_4123500 2m ECN cable (load -side）5ｍ_4123501 5m ECN cable (load -side）10ｍ_4123502 10m ECN cable(anti-load-side）2ｍ_4123505 2m ECN cable(anti-load-side）5ｍ_4123506 5m ECN cable(anti-load-side）10ｍ_4123507 10m 
Left:load-side-lead Right:opposite to load-side-lead
２．MOTpower cable（load -side ／anti-load-side）
Cables for connecting the servo amplifier and valve *It is not ashield cableModele length (L) MOT cable（load -side）2ｍ_4123520 2m MOT cable（load -side）5ｍ_4123521 5m MOT cable（load -side）10ｍ_4123522 10m MOT cable（anti-load-side）2ｍ_4123525 2m MOT cable（anti-load-side）5ｍ_4123526 5m MOT cable（anti-load-side10ｍ_4123527 10m 
*It is not a shield cable
３．Electromagnetic brake cable（load -side ／anti-load-side）
Servo motor cable with electromagnetic brake. *It is not ashield cableModele length (L) Br cable（load-side）2ｍ_4123540 2m Br cable（load-side）5ｍ_4123541 5m Br cable（load-side）10ｍ_4123542 10m Br cable（anti-load-side）2ｍ_4123545 2m Br cable（anti-load-side）5ｍ_4123546 5m Br cable（anti-load-side）10ｍ_4123547 10m 
*It is not a shield cable
４．SPT-M cable
Cables for connecting the servo amplifier and controllerModele length (L) SPT-M cable_4123051(1.0/0.15ｍ) 1.0/0.15ｍ 
５．Analog I/O cable
Cable for Analog I/O to controller (Using 2 axis, 2cables are needed) *shield cableModele length (L) Analog I/O cable_4123314 (2m) 2m Analog I/O cable_4123315(3m) 3m Analog I/O cable_4123316(5m) 5m 
*shield cable
６．-１ REMOTE I/F F cable
Cable for Remote I/O to controller (Flat cable)Modele length (L) REMOTE I/F F cable_4123335（1m） 1m REMOTE I/F F cable_4123336（2m） 2m REMOTE I/F F cable_4123337（3m） 3m REMOTE I/F F cable_4123338（4m） 4m REMOTE I/F F cable_4123339（5m） 5m 
６．-2 REMOTE I/F cable
Cable for Remote I/O to controllerModele length (L) REMOTE I/F cable_4123325（1m） 1m REMOTE I/F cable_4123326（2m） 2m REMOTE I/F cable_4123327（3m） 3m REMOTE I/F cable_4123328（4m） 4m REMOTE I/F cable_4123329（5m） 5m 