Multi-Position・Motor Drive・Compact Gate Valve MEX-LD-MP Series

MEX-LD-MP Series

Our original drive system has superior cost performance

1.Low-price Automatic pressure control is made low-priced
2.High-performance Adopt high performance servomotor and new driven mechanism
3.High-functionality Full closing, Multi-position control, Auto pressure control

Motor position-selected (three-position)

select from three types

MEX-LD-MP-R

MEX-LD-MP-L

MEX-LD-MP-F

Features

◇ Full closing (shut-off valve) and conductance adjustment can be done by one unit.
◆ The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
◇ This valve can be stopped at any position of maximum 14- position and at the fully closed, fully open.
Positioning settings can be done easily with the teaching box or PC software.
◆ By adding optional components for control, automatic pressure control valve can be used as.
◇ The valve disc position can be confirmed from the outside by its angle indicator.
◆ The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to
install the exhaust system.
◇ Fully closed and fully open position detecting sensor can be equipped as an option.

Basic specification

STD FLANGE JIS・ISO・CF
Leak Rate Housing 1×10-11 Pa m3/s >
Valve seat  1×10-10 Pa m3/s >
Pressure Range 105~10-6 Pa
Stem Seal Viton O-ring
Diameter 70~400(mm)
Power
Power supply
Control power
DC24V (max 3.0A )
DC24V (max 3.0A )
Driven mechanism AC servo-motor (built-in encoder)
Main material SUS304

※ Subject to change without any notice
※ Please contact us as we can manufacture special sizes and special specifications.
※ The diameter is limited to the mounting direction. Please inquire our sales.

※To improve this specification may change without notice.

System configuration

System configuration

※ Included in the valve unit:Valve body、Servo-motor、Servo-amplifier
(Please refer to the “optional selection list” other than those above.)

Equipped sevo-amplifier dimensions

Equipped sevo-amplifier dimensions

About the motor correspondence of those other than a standard

We will consult also about change on motors according to the equipment usage environment of your company, such as servo motors other than a standard motor.
Example of correspondence:Mitsubishi Electric’s AC servo motor MR-J3 series and MR-J4 series etc.

Dimensions of MEX-JIS-LD Series

Dimensions of MEX-JIS-LD Series

Unit in: mm

Model

MEX-80JIS-LD-MP-( )

MEX-100JIS-LD-MP-( )

MEX-150JIS-LD-MP-( )

MEX-200JIS-LD-MP-( )

MEX-250JIS-LD-MP-( )

MEX-300JIS-LD-MP-( )

MEX-350JIS-LD-MP-( )

MEX-400JIS-LD-MP-( )

Diameter

80

100

150

200

250

300

350

400

MOD No

16709□□

16710□□

16711□□

16712□□

16713□□

16714□□

16714□□

16715□□

A

70

70

80

80

85

85

100

100

B

80

100

150

200

250

300

350

400

D

160

185

235

300

350

400

450

520

n—E

4-M10

8-M10

8-M10

8-M12

12-M12

12-M12

12-M12

12-M16

F

14

14

14

15

16

16

18

18

G

135

160

210

270

320

370

420

480

H

314.5

314.5

401.5

541

654

752

916

1023

J

150

150

192

254

305

356

433

483

L

245

245

245

262

262

262

289.5

289.5

M

105

105

105

116

120

121

106

107

Q

174

174

174

192

196

197

204

205

R

110

110

110

140

140

140

140

140

T

180

180

235

308

380

430

512

560

U

158

158

210

284

348

402

480

528

V

60

60

60

60

72

72

80

82

W

79

79

99

135

165

190

231

255

Note1:The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance)
Note2:A motor position type enters in ( ) of form. (It chooses from three positions)
Note3:An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4:Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.

Dimensions of MEX-ISO-LD Series

Dimensions of MEX-ISO-LD Series

Unit in: mm

Model

MEX-80ISO-

LD-MP-( )

MEX-100ISO-

LD-MP-( )

MEX-150ISO-

LD-MP-( )

MEX-200ISO-

LD-MP-( )

MEX-250ISO-

LD-MP-( )

MEX-300ISO-

LD-MP-( )

MEX-400ISO-

LD-MP-( )

Diameter

80

100

150

200

250

300

400

MOD No

16767□□

16768□□

16770□□

16771□□

16772□□

16773□□

16774□□

A

70

70

80

80

85

85

100

B

80

100

150

200

250

300

400

C

83

102

153

213

261

318

400

D

145

165

225

285

335

425

510

n—E

8-M8

8-M8

8-M10

12-M10

12-M10

12-M12

16-M12

F

14

14

14

15

16

16

18

G

125

145

200

260

310

395

480

H

314.5

314.5

401.5

541

654

752

1023

J

150

150

192

254

305

356

483

L

245

245

245

262

262

262

289.5

M

105

105

105

116

120

121

107

Q

174

174

174

192

196

197

205

R

110

110

110

140

140

140

140

T

180

180

235

308

380

430

560

U

158

158

210

284

348

402

528

V

60

60

60

60

72

72

82

W

79

79

99

135

165

190

255

Note1:The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2:A motor position type enters in () of form. (It chooses from three positions)
Note3:An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4:Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.

Dimensions of MEX-CF-LD Series

Dimensions of MEX-CF-LD Series

Unit in: mm

Model

MEX-70CF-

LD-MP-( )

MEX-100CF-

LD-MP-( )

MEX-150CF-

LD-MP-( )

MEX-200CF-

LD-MP-( )

MEX-250CF-

LD-MP-( )

Diameter

70

100

150

200

250

MOD No

16743□□

16744□□

16745□□

16746□□

16747□□

CFflange size

CF114

CF152

CF203

CF253

CF305

A

70

70

80

80

100

B

70

100

150

200

250

D

113.5

151.6

202.4

253.2

306

n—E

8-M8

16-M8

20-M8

24-M8

32-M8

F

14

14

14

16

23

G

92.1

130.2

181

231.8

284

H

314.5

314.5

401.5

541

654

J

150

150

192

254

305

L

245

245

245

262

262

M

105

105

105

116

120

Q

174

174

174

192

196

R

110

110

110

140

140

T

180

180

235

308

380

U

158

158

210

284

348

V

60

60

60

60

72

W

79

79

99

135

165

Note1 The above Flanges are accordance with ISO 3669 Vacuum technology-Bakable Flange
Note2:A motor position type enters in () of form. (It chooses from three positions)
Note3:An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4:Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.

<Option>MBV-LDⅡ-MP (Multi-position control)

  • 1.Motor encoder extension cable

    Cables for connecting the servo amplifier and valve
    Model No. length(L)
    MOT/ENC cable_4122202(1m) 1m
    MOT/ENC cable_4122204(2m) 2m
    MOT/ENC cable_4122206(3m) 3m
    MOT/ENC cable_4122208(4m) 4m
    MOT/ENC cable_4122210(5m) 5m
    MOT/ENC cable_4122218(6m) 9m
    MOT/ENC cable_4122220(10m) 10m
    MOT/ENC cable_4122230(15m) 15m
    MOT/ENC cable_4122240(20m) 20m
    Motor cable
    Encoder cable
  • 2.Power parallel cable

    Cable for power supply to servo amplifier
    Model No. length(L)
    Power parallel cable _4122306 (3m) 3m
    Power parallel cable _4122310 (5m) 5m
    Power parallel cable _4122320 (10m) 10m
  • 3.-1 PC software

    Model No. Remarks
    TBVST-CTC-JP-SET_4122040 Japanese version
    TBVST-CTC-EN-SET_4122041 English version

    【PC software Standard set accessories】
    ① ADP-1(Conversion adapter)
    ② ADP-2-4(Connector converter)
    ③ SIO cable (1m)
    ④ ADP cable (1m)

  • 3.-2Teaching box

    Model No. Remarks
    CTA-23-SET_4122070 Digital indication

    【Teaching box Standard set accessories】
    ① ADP cable (1m)

    ※The case lack of the connection length by a standard set accessory cable of 3-1 and 3-2 common option
    (1m), Please select the cable length of the table below .(option)

  • SIO cable
    Model length(L)
    SIO cable _4120604 (2m) 2m
    SIO cable _4120606 (3m) 3m
    SIO cable _4120610 (5m) 5m
  • ADP cable
    Model length(L)
    ADP cable_4122406 (3m) 3m
    ADP cable_4122410 (5m) 5m
    ADP cable_4122420 (10m) 10m