Automatic Pressure Control System. Dual Controller FPC-181S
Low-price、High-performance、Compact size、and Various functionarity.
MBV-(SDⅡ)(ADⅡ)(LDⅡ)-M4-ARJ/APC
MEX-LD-ARJ/APC Series
☆ In switching of APC mode and MPA mode , it enables more versatile control.
☆ Two valves can be controlled by a single controller FPC-181S.
☆ Parameter settings can be easy to connect a personal computer1. Also, without connecting to the PLC, it is also possible to operate the system from a personal computer .
☆ It can completely seal our valve to be used in this system. Therefore can be full closed of the exhaust line as well as automatically controlling the pressure.
“Butterfly Valve MBV-(ADⅡ)(LDⅡ)-ARJ Series / Gate Valve MEX-LD-ARJ Series”
“Butterfly Valve MBV-AZ Series / Gate Valve MEX-LD-AZ Series”
“Butterfly Valve MBV-LDⅡ-MP Series / Gate Valve MEX-LD-MP Series”
☆Auto pressure control for Leakage type of low-cost （The 20A NW25 size is also prepare with fully-closable specifications.） SDⅡ-M4-ARJ Series・SDⅡ-AZ Series
☆Power failure protection is enabled by adding UPS power supply.If power failure occurred, the valve moves to the fully closed position automatically.
☆ Ethernet communication or RS485 communication is also available as an option.
１．ＡＰＣ mode （Auto pressure control mode）
☆ Various control methods are selectable
①Two valves are individually controlled by signals from the two vacuum gauges.
②The two valves can be synchronized controlled by a signal from a single vacuum gauge.
③One valve can be controlled by switching the signal from two vacuum gages according to pressure.
④The two valves can be synchronized controlled by switching the signal from two vacuum gages according to pressure.
☆Finer pressure setting is possible.
①Maximum 8 segments（step） program by each valves can be made eight patterns.
②The PID value can be set eight patterns every each segment
③Pressure setting and time can be combined.
④ ② and ③ can be combined, and it is possible to obtain a faster response than pressure fluctuations.
☆This controller can be a wide range of pressure control by using the two vacuum gauge is switched according to the pressure .
☆ Depending on the parameter settings, vacuum gauges with linear output and log output can be used.
☆ Automatic pressure control and multi-position control are both available.From any position to target position can be fast and smooth pressure control.
２．ＭＰＡ mode（Simplified pressure control mode）
☆ By entering the current （4～20 mA or 0～10V） to the controller , it enable to operate between the fully closed – fully open to the linear.
☆ Pre-registered that had been 16 position （14 position other than fully- closed , fully- open ） , it will be able to move the valve disc with a signal from the outside.
Basic specification
１． Controller 「 F P C -1 8 1 S」
In APC mode, the valve can work fast and accurately when the output signal of vacuum gaugecalculates automatically, also stable control.
Furthermore, by switching to MPA mode, current (4-20 mA) or voltage(0-10V) can be inputted directly, it can be made to operate linearly between fully-closed to fully-open.
| Model | ＦＰＣ－１８１Ｓ | |
| Input Power/ Current consumption |
DＣ２４Ｖ ・ １Ａ（Ｍａｘ） （vacuum gauge power supply is not supplied） | |
| Mode | ＡＰＣ mode | ＭＰＡ mode |
| Control system | ＰＩＤ control | Position control according to the current command and voltage command. |
| Maximum resolution | ０．１% of Sensor (vacuum gauge) ＦＳ | ０．１% of Input current ＦＳ |
| Features | ・Indicator of current pressure, target pressure, parameter settings of PID ,These operation can be done easily on the personal computer. ・It can be operated with a personal computer other than the remote operation by input and output of an external signal. ・Setting and operating of the multi-position is possible on the touch panel except pressure control by PC.（maximum 14-position and at the fully closed, fully open） |
・4mA:(or 0V) fully-closed , 20mA(or10V※１）fully- open , during which the valve disc will movelinearly in response to the current value. ・The valve disc can be moved by an external signal to the 16 -position which is set in the PC. （maximum 14-position and at the fully closed, fully open） |
| ・Alarm output to servo system trouble.（Red LED） | ||
| External dimensions | ３１．６ × １４２ × １７２ | |
| Opution | ・Ethernet communication RS485 communication others | |
*1 Upper limit value (voltage at fully- open) of voltage input can be set between 0 ～ 10V.
２．Vacuum gauge
The vacuum gauge can have you just use a commercial article using now.
Please use a linear voltage output or Log voltage output.
Upper and lower limits of the voltage can be set between 0 ～ + 10DCV.
３．Control Valve
Select the type according to specifications from our motor drive butterfly valves「MBV-LDⅡ-M4 / MBV-LDⅡMP series」 or Multi-position compact gate valves 「MEX-LD-LD-M4/ MEX-LD MP series」.
①M4 Series
| Butterfly valve MBV-(SDⅡ)(LDⅡ)(ADⅡ)-M4 Series |
Gate valve ＭＥＸ-ＬＤ－Ｍ４ Series |
|
| Leak rate | １×１０-9 Ｐａ・ｍ3／ｓ≦ | １×１０-10 Ｐａ・ｍ3／ｓ≦ |
| Availability | １０5～１０-6 Ｐａ | |
| Gas contact material | ＳＵＳ３０４ | |
| Driven mechanism | ＡＣ servo-motor | |
| Input power/ Current consumption |
ＡＣ２００－２４０Ｖ １．７Ａ（２．８Ａ） ＡＣ１００－１２０Ｖ ５．４Ａ（９．４Ａ） ※Values in ( ) are for diameters of 200Ａ or more for the ADII series. |
ＡＣ２００－２４０Ｖ １．７Ａ ＡＣ１００－１２０Ｖ ５．４Ａ |
| Valve disc seal | Viton O-ring | |
| Valve rod seal | Viton O-ring | |
| Vacuum grease | Klüberalfa GR | |
| Critical temperature | Body：１５０℃ Drive part：４０℃ | |
| Diameter | ２０Ａ ～ ３００Ａ | ７０/８０Ａ ～ ４００Ａ |
| Flange type | ＪＩＳ ＩＳＯ ＣＦ ＫＦ（ＮＷ） | ＪＩＳ ＩＳＯ ＣＦ |
Please refer to a catalogue of 「MBV-SDⅡ-M4 series(leakage type)」or「MBV-ADⅡ-M4 series(full-close type)
About the detailed specification and dimensions of the valve.
②ＡＺ Series
| Butterfly valve ＭＢＶ－(ＳＤⅡ)/(ＬＤⅡ)-AZ Series |
Ｇａｔｅ valve ＭＥＸ－ＬＤ－AZ Series |
|
| Leak rate | １×１０-9 Ｐａ・ｍ3／ｓ | １×１０-10 Ｐａ・ｍ3／ｓ |
| Availability | １０5～１０-6 Ｐａ | |
| Gas contact material | ＳＵＳ３０４ | |
| Driven mechanism | Stepping motor | |
| Input power/ Rated current |
DC power driver ・Voltage：DC24V±5% （or DC48V±5%） Current：3.45A（3.7A）※１ AC power driver ・Main power：Single-phase AC100-120V Current：5.4A Control power supply：DC24V current：0.25A（0.5A）※1 ・Main power：Single-phase AC200-240V Current：3.3A or Three-phase AC200-240V Current：2.0A Control power supply：DC24V Current 0.25A（0.5A）※1 ※1 If the electromagnetic brake is equipped, the current value of the DC power supply is ( ). |
|
| Disk seal | Viton O-ring | |
| Shaft seal | Viton O-ring | |
| Used vacuum grease | Klüberalfa GR | |
| Heatproof temperature |
Body：１５０℃ Drive part：４０℃ | |
| Diameter | ２０Ａ ～ ３００Ａ | ７０/８０Ａ ～ ４００Ａ |
| Flange type | ＪＩＳ ＩＳＯ ＣＦ ＫＦ（ＮＷ） | ＪＩＳ ＩＳＯ ＣＦ |
Please refer to a catalogue of 「MBV-SDⅡ-AZ series(leakage type)」or「MBV-LDⅡ-AZ series (full-close type)/
MEX-LD-AZ Series」
About the detailed specification and dimensions of the valve.
③MP Series
| Butterfly valve ＭＢＶ－ＬＤⅡ-ＭＰ Series |
Ｇａｔｅ valve ＭＥＸ－ＬＤ－ＭＰ Series |
|
| Leak rate | １×１０-9 Ｐａ・ｍ3／ｓ | １×１０-10 Ｐａ・ｍ3／ｓ |
| Availability | １０5～１０-6 Ｐａ | |
| Gas contact material | ＳＵＳ３０４ | |
| Driven mechanism | Servo-motor | |
| Input power/ Rated cur |
Power supply ：DC24V ３．０A Control power supply：DC24V ０．２A | |
| Disk seal | Viton O-ring | |
| Shaft seal | Viton O-ring | |
| Used vacuum grease | Klüberalfa GR | |
| Heatproof temperature |
Body：１５０℃ Drive part：４０℃ | |
| Diameter | ２０Ａ ～ ３００Ａ | ７０/８０Ａ ～ ４００Ａ |
| Flange type | ＪＩＳ ＩＳＯ ＣＦ ＫＦ（ＮＷ） | ＪＩＳ ＩＳＯ ＣＦ |
Please refer to a catalogue of 「MBV-LDⅡ-MP series (full-close type)/MEX-LD-AZ Series」
About the detailed specification and dimensions of the valve.
Controller：FPC－181S
| No | NAME（Function） | No | NAME（Function） |
| 1 | DC24V Power supply（Connector） | 8 | Termi Bus（Connector） |
| 2 | REMOTE I/O 1（Connector） | 9 | UPS（Connector） |
| 3 | REMOTE I/O 2（Connector） | 10 | Micro B（Connector） |
| 4 | Analog I/O 1（Connector） | 11 | POWER（LED） |
| 5 | Analog I/O 2（Connector） | 12 | READY（LED） |
| 6 | D24 Connect 1 (Connector） | 13 | ALARM（LED） |
| 7 | D24 Connect 2 (Connector） |
Controller：FPC－181S Ethernet communication / RS485 communication
| No | NAME（Function） | No | NAME（Function） |
| 1 | DC24V Power supply（Connector） | 8 | Termi Bus（Connector） |
| 2 | REMOTE I/O 1（Connector） | 9 | UPS（Connector） |
| 3 | REMOTE I/O 2（Connector） | 10 | Micro B（Connector） |
| 4 | Analog I/O 1（Connector） | 11 | POWER（LED） |
| 5 | Analog I/O 2（Connector） | 12 | READY（LED） |
| 6 | D24 Connect 1 (Connector） | 13 | ALARM（LED） |
| 7 | D24 Connect 2 (Connector） | 14 | Ethernet interface (connector) RS-485 interface (connector) |
FPC-181S(M4-ARJ)＜APC mode＞【System diagram－1】
FPC-181S(M4-ARJ)＜APC mode＞【System diagram－2】
FPC-181S(M4-ARJ)＜MPA mode＞ 【System diagram－3】
| Name ・ Model | 1-axis control | 2-axis control |
| qty | qty | |
| Controller ＦＰＣ－１８１Ｓ（attached softwear for setting） | １ | １ |
| Valve （with Servo amplifier） ＭＢＶ－ＳＤⅡ－Ｍ４－ＡＲＪ Valve （with Servo amplifier） ＭＢＶ－AＤⅡ－Ｍ４－ＡＲＪ Valve （with Servo amplifier） ＭＢＶ－LDⅡ－Ｍ４－ＡＲＪ Valve （with Servo amplifier） ＭEX－LD－Ｍ４－ＡＲＪ |
１ | ２ |
| One set of cable | ||
| ① ENC cable_４１２３５００ （Ｌ＝２．０ｍ） | １ | 2 |
| ② MOT cable_４１２２３５１ （Ｌ＝２．０ｍ） | １ | 2 |
| ③ STP－M cable_４１２３０５１（Ｌ＝１．０ｍ/０．１５ｍ） | １ | 2 |
| ④ Analog I/O cable_４１２３３１５（Ｌ＝３．０ｍ） | １ or ２ | 2 |
| ⑤ REMOTE I/F cable_４１２３３３７（Ｌ＝３．０ｍ） | １ | 2 |
1 axis control system constitution reference
Biaxial control system constitution reference
FPC-181S(AZ) DC power driver ＜APC mode＞【System diagram－1】
FPC-181S(AZ) DC power driver ＜APC mode＞【System diagram－2】
FPC-181S(AZ) DC power driver ＜MPA mode＞【System diagram－3】
〈reference standard set〉
| Name ・ Model | 1-axis control | 2-axis control |
| qty | qty | |
| Controller ＦＰＣ－１８１Ｓ （attached softwear for setting） | １ | １ |
| Valve （with Driver） ＭＢＶ－ＳＤⅡ-ＡＺ－ＫＤ Valve （with Driver） ＭＢＶ－LＤⅡ-ＡＺ－ＫＤ Valve （with Driver） ＭＥＸ－ＬＤ－ＡＺ－ＫＤ |
１ | ２ |
| One set of cable | ||
| ① Connection cable set _４１２３８２３ （Ｌ＝２．０ｍ） | １ | 2 |
| ② ＳＰＴ－Ｏ cable_４１２３５７０ （Ｌ＝１．０/０．５ｍ） | １ | 1 |
| ③ Analog I/O cable_４１２３３１５（Ｌ＝３．０ｍ） | １ or ２ | 2 |
| ⑤ REMOTE I/F cable_４１２３３３７（Ｌ＝３．０ｍ） | １ | 2 |
※For 2-axis control, connect the drivers with a commercially available LAN cable.
FPC-181S(AZ) AC power driver ＜APC mode＞【System diagram－1】
FPC-181S(AZ) AC power driver ＜APC mode＞【System diagram－2】
FPC-181S(AZ) AC power driver ＜MPA mode＞【System diagram－3】
〈reference standard set〉
| Name ・ Model | 1-axis control | 2-axis control |
| qty | qty | |
| Controller ＦＰＣ－１８１Ｓ （attached softwear for setting） | １ | １ |
| Valve （with Driver） ＭＢＶ－ＳＤⅡ-ＡＺ－ＡＤ/ＣＤ Valve （with Driver） ＭＢＶ－LＤⅡ-ＡＺ－ＡＤ/ＣＤ Valve （with Driver） ＭＥＸ－ＬＤ－ＡＺ－ＡＤ/ＣＤ |
１ | ２ |
| One set of cable | ||
| ① Connection cable set _４１２３８２３ （Ｌ＝２．０ｍ） | １ | 2 |
| ② ＳＰＴ－Ｏ cable_４１２３５７０ （Ｌ＝１．０/０．５ｍ） | １ | 1 |
| ③ Analog I/O cable_４１２３３１５（Ｌ＝３．０ｍ） | １ or ２ | 2 |
| ④ REMOTE I/F cable_４１２３３３７（Ｌ＝３．０ｍ） | １ | 2 |
※For 2-axis control, connect the drivers with a commercially available LAN cable.
FPC-181S (MP) ＜APC mode＞ 【System diagram－1】
FPC-181S (MP)＜APC mode＞ 【System diagram－2】
FPC-181S (MP) ＜MPA mode＞ 【System diagram－3】
〈reference standard set prices 〉
| Name ・ Model | 1-axis control | 2-axis control |
| qty | qty | |
| Controller ＦＰＣ-１８１Ｓ（attached softwear for setting） | １ | １ |
| Valve （with Servo amplifier） ＭＢＶ－ＬＤⅡ－ＭＰ Valve （with Servo amplifier） ＭEX－ＬD－ＭＰ |
１ | ２ |
| One set of cable | ||
| ① MO/ENC cable_４１２２０６ （Ｌ＝３．０ｍ） | １ | ２ |
| ② STP cable_４１２３４００（Ｌ＝０．５ｍ/０．１５ｍ） | １ | ２ |
| ③ Parallel connection cable_４１２２３１５（Ｌ＝３．０ｍ） | １ | ２ |
| ④ Analog I/O cable_４１２３３１５（Ｌ＝３．０ｍ） | １ or ２ | ２ |
| ⑤ REMOTE I/F cable_４１２３３３７（Ｌ＝３．０ｍ） | １ | ２ |
＜Option＞Dual Controller FPC-181S
１．ECN cable（load -side ／anti-load-side）
Cables for connecting the servo amplifier and valveModele length (L) ECN cable (load -side）2ｍ_4123500 2m ECN cable (load -side）5ｍ_4123501 5m ECN cable (load -side）10ｍ_4123502 10m ECN cable(anti-load-side）2ｍ_4123505 2m ECN cable(anti-load-side）5ｍ_4123506 5m ECN cable(anti-load-side）10ｍ_4123506 10m 
load-side-lead / opposite to load-side-lead
２．MOTpower cable（load -side ／anti-load-side）
Cables for connecting the servo amplifier and valve *It is not ashield cableModele length (L) MOT cable（load -side）2ｍ_4123520 2m MOT cable（load -side）5ｍ_4123521 5m MOT cable（load -side）10ｍ_4123522 10m MOT cable（anti-load-side）2ｍ_4123525 2m MOT cable（anti-load-side）5ｍ_4123526 5m MOT cable（anti-load-side）10ｍ_4123527 10m 
*It is not a shield cable
３．Electromagnetic brake cable（load -side ／anti-load-side）
Servo motor cable with electromagnetic brake. *It is not ashield cableModele length (L) Br cable（load-side）2ｍ_4123540 2m Br cable（load-side）5ｍ_4123541 5m Br cable（load-side）10ｍ_4123542 10m Br cable（anti-load-side）2ｍ_4123545 2m Br cable（anti-load-side）5ｍ_4123546 5m Br cable（anti-load-side）10ｍ_4123547 10m 
*It is not a shield cable
４．SPT-M cable
Cables for connecting the servo amplifier and controllerModele length (L) SPT-M cable_4123051(1.0/0.15ｍ) 1.0/0.15ｍ 
５．Analog I/O cable
Cable for Analog I/O to controller (Using 2 axis, 2cables are needed) *shield cableModele length (L) Analog I/O cable_4123314 (2m) 2m Analog I/O cable_4123315(3m) 3m Analog I/O cable_4123316(5m) 5m 
*shield cable
６．-１ REMOTE I/F F cable
Cable for Remote I/O to controller (Flat cable)Modele length (L) REMOTE I/F F cable_4123335（1m） 1m REMOTE I/F F cable_4123336（2m） 2m REMOTE I/F F cable_4123337（3m） 3m REMOTE I/F F cable_4123338（4m） 4m REMOTE I/F F cable_4123339（5m） 5m 
６．-2 REMOTE I/F cable
Cable for Remote I/O to controllerModele length (L) REMOTE I/F cable_4123325（1m） 1m REMOTE I/F cable_4123326（2m） 2m REMOTE I/F cable_4123327（3m） 3m REMOTE I/F cable_4123328（4m） 4m REMOTE I/F cable_4123329（5m） 5m 
１．Motor encoder extension cable
Cables for connecting the servo amplifier and valveModele length (L) MOT/ENC extension cable_4122202 (1m) 1m MOT/ENC extension cable_4122204 (2m) 2m MOT/ENC extension cable_4122206 (3m) 3m MOT/ENC extension cable_4122208 (4m) 4m MOT/ENC extension cable_4122210 (5m) 5m MOT/ENC extension cable_4122218 (9m) 9m MOT/ENC extension cable_4122220 (10m) 10m MOT/ENC extension cable_4122230 (15m) 15m MOT/ENC extension cable_4122240 (20m) 20m 
（MOT）Motor extension cable
（ENC）Encoder extension cable
２．ＳＰＴ cable
Cables for connecting the servo amplifier and controllerModele length (L) SPT cable_4123400(0.5/0.15ｍ) 0.5/0.15ｍ 
３．Parallel connection cable
Cable for power supply to servo amplifierModele length (L) Parallel connection cable_4122306 (3m) 3m Parallel connection cable_4122310 (5m) 5m Parallel connection cable_4122320 (10m) 10m 
５．Analog I/O cable
Cable for Analog I/O to controller (Using 2 axis, 2cables are needed) *shield cableModele length (L) Analog I/O cable_4123314 (2m) 2m Analog I/O cable_4123315(3m) 3m Analog I/O cable_4123316(5m) 5m 
*shield cable
６．-１ REMOTE I/F F cable
Cable for Remote I/O to controller (Flat cable)Modele length (L) REMOTE I/F F cable_4123335（1m） 1m REMOTE I/F F cable_4123336（2m） 2m REMOTE I/F F cable_4123337（3m） 3m REMOTE I/F F cable_4123338（4m） 4m REMOTE I/F F cable_4123339（5m） 5m 
６．-2 REMOTE I/F cable
Cable for Remote I/O to controllerModele length (L) REMOTE I/F cable_4123325（1m） 1m REMOTE I/F cable_4123326（2m） 2m REMOTE I/F cable_4123327（3m） 3m REMOTE I/F cable_4123328（4m） 4m REMOTE I/F cable_4123329（5m） 5m